Analysis of nano-indentation measurements on carbon nitride films

Yukihiro Kusano; I.M. Hutchings

doi:10.1016/S0257-8972(03)00132-4

Analysis of nano-indentation measurements on carbon nitride films

Yukihiro Kusano, I.M. Hutchings

University of Cambridge

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

Analysis of nano-indentation experiments on thin carbon nitride films is complicated by the high elastic recovery and high unloading curvature observed with these materials. Methods of data analysis are compared, and a recent model by Cheng and Cheng [Surf. Coat. Technol. 133–134 (2000) 417], which uses the work done during indentation, is applied to carbon nitride films for the first time. This is found to give better estimates of hardness and modulus than the other methods.

Original language	English
Journal	Surface and Coatings Technology
Volume	169-170
Pages (from-to)	739-742
ISSN	0257-8972
DOIs	https://doi.org/10.1016/S0257-8972(03)00132-4
Publication status	Published - 2003
Externally published	Yes

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title = "Analysis of nano-indentation measurements on carbon nitride films",

abstract = "Analysis of nano-indentation experiments on thin carbon nitride films is complicated by the high elastic recovery and high unloading curvature observed with these materials. Methods of data analysis are compared, and a recent model by Cheng and Cheng [Surf. Coat. Technol. 133–134 (2000) 417], which uses the work done during indentation, is applied to carbon nitride films for the first time. This is found to give better estimates of hardness and modulus than the other methods.",

author = "Yukihiro Kusano and I.M. Hutchings",

year = "2003",

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AU - Kusano, Yukihiro

AU - Hutchings, I.M.

PY - 2003

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AB - Analysis of nano-indentation experiments on thin carbon nitride films is complicated by the high elastic recovery and high unloading curvature observed with these materials. Methods of data analysis are compared, and a recent model by Cheng and Cheng [Surf. Coat. Technol. 133–134 (2000) 417], which uses the work done during indentation, is applied to carbon nitride films for the first time. This is found to give better estimates of hardness and modulus than the other methods.

U2 - 10.1016/S0257-8972(03)00132-4

DO - 10.1016/S0257-8972(03)00132-4

M3 - Journal article

SN - 0257-8972

VL - 169-170

SP - 739

EP - 742

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Analysis of nano-indentation measurements on carbon nitride films

Abstract

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