Analysis of Charge Pump Topologies for High Voltage Mobile Microphone Applications

Jakob K. Toft*, Ivan H.H. Jorgensen

*Corresponding author for this work

    Research output: Contribution to journalJournal articleResearchpeer-review

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    This paper presents a novel analysis of charge pump topologies for very high voltage capacitive drive micro electro-mechanical system microphones. For the application, the size and power consumption are sought to be minimized, and a voltage gain of 36 is achieved from a 5 V supply. The analysis compares known charge pump topologies, taking into consideration on resistance of transistors and parasitic capacitances of transistors and capacitors in a 180 nm silicon-on-insulator process. The analysis finds that the Pelliconi charge pump topology is optimal for generating very high bias voltages for micro electro-mechanical system microphones from a low supply voltage when the power consumption and area are limited by the application.
    Original languageEnglish
    JournalElektronika ir Elektrotechnika
    Issue number2
    Pages (from-to)31-39
    Publication statusPublished - 2021


    • Charge pumps
    • High voltage techniques
    • Microelectromechanical systems
    • Microphones
    • Silicon-oninsulator


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