| Original language | English |
|---|---|
| Journal | Sensors Actuators A |
| Volume | 103 |
| Issue number | 3 |
| Pages (from-to) | 353-358 |
| Publication status | Published - 2003 |
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An integrated piezo-acoustic shear-force distance sensor with nanometer resolution for a micropipette tool
- Daniel Häfliger
- , M. Muenchinger
- , G. Schitter
- , A. Stemmer
Research output: Contribution to journal › Journal article › Research › peer-review