An integrated piezo-acoustic shear-force distance sensor with nanometer resolution for a micropipette tool

Daniel Häfliger, M. Muenchinger, G. Schitter, A. Stemmer

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSensors Actuators A
    Volume103
    Issue number3
    Pages (from-to)353-358
    Publication statusPublished - 2003

    Cite this

    Häfliger, D., Muenchinger, M., Schitter, G., & Stemmer, A. (2003). An integrated piezo-acoustic shear-force distance sensor with nanometer resolution for a micropipette tool. Sensors Actuators A, 103(3), 353-358.