An integrated piezo-acoustic shear-force distance sensor with nanometer resolution for a micropipette tool

Daniel Häfliger, M. Muenchinger, G. Schitter, A. Stemmer

Research output: Contribution to journal › Journal article › Research › peer-review

OpenUrl availability

@article{0af13a4cffb246fb88e4b65b88537695,

title = "An integrated piezo-acoustic shear-force distance sensor with nanometer resolution for a micropipette tool",

author = "Daniel H{\"a}fliger and M. Muenchinger and G. Schitter and A. Stemmer",

year = "2003",

language = "English",

volume = "103",

pages = "353--358",

journal = "Sensors Actuators A",

issn = "1873-3069",

publisher = "Elsevier",

number = "3",

}