An Evolutionary Approach for Robust Layout Synthesis of MEMS

Zhun Fan; Jiachuan Wang; Erik Goodman

doi:10.1109/AIM.2005.1511171

An Evolutionary Approach for Robust Layout Synthesis of MEMS

Zhun Fan, Jiachuan Wang, Erik Goodman

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Abstract

The paper introduces a robust design method for layout synthesis of MEM resonators subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimisation problem after certain assumptions and treated with multiobjective genetic algorithm (MOGA), a special type of evolutionary computing approaches. Case study based on layout synthesis of a comb-driven MEM resonator shows that the approach proposed in this paper can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than typical designs

Original language	English
Title of host publication	Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Publisher	IEEE
Publication date	2005
ISBN (Print)	0-7803-9047-4
DOIs	https://doi.org/10.1109/AIM.2005.1511171
Publication status	Published - 2005
Event	2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Monterey, United States Duration: 24 Jul 2005 → 28 Jul 2005 https://ieeexplore.ieee.org/xpl/conhome/10040/proceeding

Conference

Conference	2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Country/Territory	United States
City	Monterey
Period	24/07/2005 → 28/07/2005
Internet address	https://ieeexplore.ieee.org/xpl/conhome/10040/proceeding

Bibliographical note

Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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title = "An Evolutionary Approach for Robust Layout Synthesis of MEMS",

abstract = "The paper introduces a robust design method for layout synthesis of MEM resonators subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimisation problem after certain assumptions and treated with multiobjective genetic algorithm (MOGA), a special type of evolutionary computing approaches. Case study based on layout synthesis of a comb-driven MEM resonator shows that the approach proposed in this paper can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than typical designs",

author = "Zhun Fan and Jiachuan Wang and Erik Goodman",

note = "Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics ; Conference date: 24-07-2005 Through 28-07-2005",

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AU - Goodman, Erik

N1 - Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

PY - 2005

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N2 - The paper introduces a robust design method for layout synthesis of MEM resonators subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimisation problem after certain assumptions and treated with multiobjective genetic algorithm (MOGA), a special type of evolutionary computing approaches. Case study based on layout synthesis of a comb-driven MEM resonator shows that the approach proposed in this paper can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than typical designs

AB - The paper introduces a robust design method for layout synthesis of MEM resonators subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimisation problem after certain assumptions and treated with multiobjective genetic algorithm (MOGA), a special type of evolutionary computing approaches. Case study based on layout synthesis of a comb-driven MEM resonator shows that the approach proposed in this paper can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than typical designs

U2 - 10.1109/AIM.2005.1511171

DO - 10.1109/AIM.2005.1511171

M3 - Article in proceedings

SN - 0-7803-9047-4

BT - Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on

PB - IEEE

T2 - 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics

Y2 - 24 July 2005 through 28 July 2005

ER -

An Evolutionary Approach for Robust Layout Synthesis of MEMS

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