An Evolutionary Approach for Robust Layout Synthesis of MEMS

Zhun Fan, Jiachuan Wang, Erik Goodman

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Abstract

The paper introduces a robust design method for layout synthesis of MEM resonators subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimisation problem after certain assumptions and treated with multiobjective genetic algorithm (MOGA), a special type of evolutionary computing approaches. Case study based on layout synthesis of a comb-driven MEM resonator shows that the approach proposed in this paper can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than typical designs
Original languageEnglish
Title of host publicationAdvanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
PublisherIEEE
Publication date2005
ISBN (Print)0-7803-9047-4
DOIs
Publication statusPublished - 2005
Event2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Monterey, United States
Duration: 24 Jul 200528 Jul 2005

Conference

Conference2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics
CountryUnited States
CityMonterey
Period24/07/200528/07/2005

Bibliographical note

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