Abstract
This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined mechanical and electrochemical performance is investigated. Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM.
Original language | English |
---|---|
Title of host publication | IEEE 24. International Conference on Micro Electro Mechanical Systems |
Publisher | IEEE |
Publication date | 2011 |
ISBN (Print) | 978-1-4244-9632-7 |
DOIs | |
Publication status | Published - 2011 |
Event | 24th International Conference on Micro Electro Mechanical Systems - Hilton Cancun Golf & Spa Resort, Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24 http://www.ieee-mems2011.org/ |
Conference
Conference | 24th International Conference on Micro Electro Mechanical Systems |
---|---|
Number | 24 |
Location | Hilton Cancun Golf & Spa Resort |
Country/Territory | Mexico |
City | Cancun |
Period | 23/01/2011 → 27/01/2011 |
Internet address |
Keywords
- Micromechanical devices
- Cantilevers
- Flow control
- Microfabrication
- Electrochemical analysis