An electrochemical-cantilever platform for hybrid sensing applications

Lee MacKenzie Fischer, Søren Dohn, Anja Boisen, Maria Tenje

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined mechanical and electrochemical performance is investigated. Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM.
    Original languageEnglish
    Title of host publicationIEEE 24. International Conference on Micro Electro Mechanical Systems
    PublisherIEEE
    Publication date2011
    ISBN (Print)978-1-4244-9632-7
    DOIs
    Publication statusPublished - 2011
    Event24th International Conference on Micro Electro Mechanical Systems - Hilton Cancun Golf & Spa Resort, Cancun, Mexico
    Duration: 23 Jan 201127 Jan 2011
    Conference number: 24
    http://www.ieee-mems2011.org/

    Conference

    Conference24th International Conference on Micro Electro Mechanical Systems
    Number24
    LocationHilton Cancun Golf & Spa Resort
    CountryMexico
    CityCancun
    Period23/01/201127/01/2011
    Internet address

    Keywords

    • Micromechanical devices
    • Cantilevers
    • Flow control
    • Microfabrication
    • Electrochemical analysis

    Cite this

    Fischer, L. M., Dohn, S., Boisen, A., & Tenje, M. (2011). An electrochemical-cantilever platform for hybrid sensing applications. In IEEE 24. International Conference on Micro Electro Mechanical Systems IEEE. https://doi.org/10.1109/MEMSYS.2011.5734554