An Astigmatic Detection System for Polymeric Cantilever-based Sensors

En-Te Hwu, Hsien-Shun Liao, Filippo Bosco, Ching-Hsiu Chen, Stephan Sylvest Keller, Anja Boisen, Kuang-Yuh Huang

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    Abstract

    We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80 MHz, allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS.
    Original languageEnglish
    JournalJournal of Sensors
    Pages (from-to)580939
    ISSN1687-725X
    DOIs
    Publication statusPublished - 2012

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