We propose an approach to a nanoscale mass sensor based on a gold electrode structure, on which a multi-walled carbon nanotube (MWCNT) bridge can be placed and soldered. The structure is comprised of three electrodes with a width of 2 or 4 mum. Two outer electrodes with a length of 10 or 15 mum serve as source and drain electrodes for the MWCNT bridge, whereas an inner electrode with a length of 8 or 13 mum is for electrostatic excitation of the CNT. Some structures have an extra pair of outer electrodes, which may deflect the inner electrodes and thereby be used for stretching or compressing the bridging nanotube. The free standing MWCNTs were fabricated by chemical vapour deposition of Fe(H) phthalocyanine. A nanomanipulator with an x - y - z translation stage was used for placing the MWCNTs across the source-drain electrodes. The nanotubes were soldered onto the substrate by electron beam induced deposition of an organometallic compound. (C) 2004 Elsevier B.V. All rights reserved.
|Conference||29th International Conference on Micro and Nano Engineering|
|Period||22/09/2003 → 25/09/2003|
- multi-walled carbon nanotubes
- electrode substrate
- mass sensor
- electron beam induced deposition