An approach to a multi walled carbon nanotube based mass sensor

Ramona Valentina Mateiu, Zachary James Davis, Dorte Nørgaard Madsen, Kristian Mølhave, Peter Bøggild, Anne-Marie Rasmussen, M. Brorson, Claus J.H. Jacobsen, Anja Boisen

    Research output: Contribution to journalConference articleResearchpeer-review

    Abstract

    We propose an approach to a nanoscale mass sensor based on a gold electrode structure, on which a multi-walled carbon nanotube (MWCNT) bridge can be placed and soldered. The structure is comprised of three electrodes with a width of 2 or 4 mum. Two outer electrodes with a length of 10 or 15 mum serve as source and drain electrodes for the MWCNT bridge, whereas an inner electrode with a length of 8 or 13 mum is for electrostatic excitation of the CNT. Some structures have an extra pair of outer electrodes, which may deflect the inner electrodes and thereby be used for stretching or compressing the bridging nanotube. The free standing MWCNTs were fabricated by chemical vapour deposition of Fe(H) phthalocyanine. A nanomanipulator with an x - y - z translation stage was used for placing the MWCNTs across the source-drain electrodes. The nanotubes were soldered onto the substrate by electron beam induced deposition of an organometallic compound. (C) 2004 Elsevier B.V. All rights reserved.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume73–74
    Issue numberSI
    Pages (from-to)670–674
    ISSN0167-9317
    DOIs
    Publication statusPublished - Jun 2004
    Event29th International Conference on Micro and Nano Engineering - Cambridge, United Kingdom
    Duration: 22 Sep 200325 Sep 2003
    Conference number: 29

    Conference

    Conference29th International Conference on Micro and Nano Engineering
    Number29
    CountryUnited Kingdom
    CityCambridge
    Period22/09/200325/09/2003

    Keywords

    • multi-walled carbon nanotubes
    • electrode substrate
    • mass sensor
    • electron beam induced deposition
    • nanomanipulation

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