Abstract
The disclosure relates to an apparatus for obtaining an image of a sample (104), the apparatus comprising a first and a second electromagnetic radiation beam, beams-managing elements for phase-modulating, guiding and directing the two beams onto the sample (104), and at least one detector (130). The beams-managing elements are arranged such that the two beams create a plurality of spatially oscillating interference patterns (132) and project them onto the sample (104). Each of the plurality of spatially oscillating interference patterns (132) results in a corresponding output signal detected by the detector (130). Finally, the image based on the plurality of the output signals is generated. The disclosure further relates to methods for generating an image of a sample.
| Original language | English |
|---|---|
| IPC | G01N 21/ 45 A I |
| Patent number | EP4109076 |
| Filing date | 22/06/2022 |
| Priority date | 22/06/2021 |
| Priority number | EP20210180791 |
| Publication status | Published - 28 Dec 2022 |
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