Abstract
An active valve for use e.g. in fluidic microsystems is provided, wherein the active valve comprises a membrane having at least one flow gate, arranged between a first and a second substantially rigid element. Adjusting means provides an adjustment of the clamping force on membrane arranged between the first and second substantially rigid element. Hereby the flow rate through the active valve can be continuously and precisely controlled.
Original language | English |
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Patent number | WO2009121364 |
Filing date | 08/10/2009 |
Country/Territory | International Bureau of the World Intellectual Property Organization (WIPO) |
Publication status | Published - 2009 |