Amorphous silicon rich silicon nitride optical waveguides clad in silica are presented as a high-index contrast platform for high density integrated optics. Performance of different cross-sectional geometries have been measured and are presented with regards to bending loss and insertion loss. A sample double ring add-drop filter is presented.
|Publication status||Published - 2004|
Philipp, H. T., Andersen, K. N., Svendsen, W. E., & Haiyan, O. (2004). Amorphous silicon rich silicon nitride optical waveguides for high density integrated optics. Electronics Letters, 40(7), 419-420.