Aluminum nanocantilevers for high sensitivity mass sensors

Zachary James Davis, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


    We have fabricated Al nanocantilevers using a simple, one mask contact UV lithography technique with lateral and vertical dimensions under 500 and 100 nm, respectively. These devices are demonstrated as highly sensitive mass sensors by measuring their dynamic properties. Furthermore, it is shown that Al has a potential higher sensitivity than Si based dynamic sensors. Initial testing of these devices has been conducted using a scanning electron microscope setup were the devices were tested under high vacuum conditions. The Q factor was measured to be approximately 200 and the mass sensitivity was measured to 2 ag/Hz by depositing electron-beam-induced carbon at the end of the nanocantilever.
    Original languageEnglish
    Title of host publicationProceedings of 2005 5th IEEE Conference on Nanotechnology (nr. TU-P4-2)
    Publication date2005
    Publication statusPublished - 2005
    Event5th IEEE Conference on Nanotechnology : July 11-15 - Nagoya, Japan
    Duration: 1 Jan 2005 → …


    Conference5th IEEE Conference on Nanotechnology : July 11-15
    CityNagoya, Japan
    Period01/01/2005 → …

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