Aluminum nano-cantilevers for high sensitivity mass sensors

Zachary James Davis, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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    Abstract

    We have fabricated Al nano-cantilevers using a very simple one mask contact UV lithography technique with lateral dimensions under 500 nm and vertical dimensions of approximately 100 nm. These devices are demonstrated as highly sensitive mass sensors by measuring their dynamic properties. Furthermore, it is shown that Al has a potential higher sensitivity than Si based dynamic sensors. Initial testing of these devices has been conducted using a novel scanning electron microscope setup were the devices were tested under high vacuum conditions. The Q-factor was measured to approximately 200 and the mass sensitivity was measured to 2 attograms/Hz by depositing electron beam induced carbon at the end of the nano-cantilever.
    Original languageEnglish
    Title of host publication5th IEEE Conference on Nanotechnology, 2005.
    PublisherIEEE
    Publication date2005
    ISBN (Print)0-7803-9199-3
    DOIs
    Publication statusPublished - 2005
    Event5th IEEE Conference on Nanotechnology, 2005. -
    Duration: 1 Jan 2005 → …

    Conference

    Conference5th IEEE Conference on Nanotechnology, 2005.
    Period01/01/2005 → …

    Bibliographical note

    Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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