We have fabricated Al nano-cantilevers using a very simple one mask contact UV lithography technique with lateral dimensions under 500 nm and vertical dimensions of approximately 100 nm. These devices are demonstrated as highly sensitive mass sensors by measuring their dynamic properties. Furthermore, it is shown that Al has a potential higher sensitivity than Si based dynamic sensors. Initial testing of these devices has been conducted using a novel scanning electron microscope setup were the devices were tested under high vacuum conditions. The Q-factor was measured to approximately 200 and the mass sensitivity was measured to 2 attograms/Hz by depositing electron beam induced carbon at the end of the nano-cantilever.
|Title of host publication||5th IEEE Conference on Nanotechnology, 2005.|
|Publication status||Published - 2005|
|Event||5th IEEE Conference on Nanotechnology, 2005. - |
Duration: 1 Jan 2005 → …
|Conference||5th IEEE Conference on Nanotechnology, 2005.|
|Period||01/01/2005 → …|