All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes

Peter Friis Østergaard, Marco Matteucci, Rodolphe Marie, Anders Kristensen, Rafael J. Taboryski

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    Micro- and nanofluidic systems fabricated in silicon and glass substrates are expensive and have long production cycles. To minimize the time used by researchers to fabricate their systems, rather than using them, medium to high volume throughput of specific chips, containing fluidic channels in the micro- and nanoregime is required. To obtain this, injection molding is included in the research process for making several chips (100-1000) with the same layout. The time it takes for the individual chip to be fabricated in this way is much shorter than with conventional cleanroom methods, and the price is equally lower. Optimization of the final chip is explored, by looking at which aspects ratios are possible to obtain in polymer chips. Finally, signal to noise ratio of the chips used for fluorescent experiments is investigated, by an expected reduction of the excitation of fluorescent states in the polymer with the use of chips in different colors.
    Original languageEnglish
    Title of host publicationNanotech 2012 Vol. 2 Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
    Volume2
    Publication date2012
    Pages482-485
    ISBN (Print)978-1-4665-6275-2
    Publication statusPublished - 2012
    EventNanotech 2012: Conference & Expo - Santa Clara Convention Center, Santa Clara, United States
    Duration: 18 Jun 201221 Jun 2012
    Conference number: 15

    Conference

    ConferenceNanotech 2012
    Number15
    LocationSanta Clara Convention Center
    CountryUnited States
    CitySanta Clara
    Period18/06/201221/06/2012

    Keywords

    • UV-LIGA
    • Nanoslits
    • Polymer Chips

    Cite this

    Østergaard, P. F., Matteucci, M., Marie, R., Kristensen, A., & Taboryski, R. J. (2012). All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes. In Nanotech 2012 Vol. 2 Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Vol. 2, pp. 482-485)
    Østergaard, Peter Friis ; Matteucci, Marco ; Marie, Rodolphe ; Kristensen, Anders ; Taboryski, Rafael J. / All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes. Nanotech 2012 Vol. 2 Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational. Vol. 2 2012. pp. 482-485
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    title = "All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes",
    abstract = "Micro- and nanofluidic systems fabricated in silicon and glass substrates are expensive and have long production cycles. To minimize the time used by researchers to fabricate their systems, rather than using them, medium to high volume throughput of specific chips, containing fluidic channels in the micro- and nanoregime is required. To obtain this, injection molding is included in the research process for making several chips (100-1000) with the same layout. The time it takes for the individual chip to be fabricated in this way is much shorter than with conventional cleanroom methods, and the price is equally lower. Optimization of the final chip is explored, by looking at which aspects ratios are possible to obtain in polymer chips. Finally, signal to noise ratio of the chips used for fluorescent experiments is investigated, by an expected reduction of the excitation of fluorescent states in the polymer with the use of chips in different colors.",
    keywords = "UV-LIGA, Nanoslits, Polymer Chips",
    author = "{\O}stergaard, {Peter Friis} and Marco Matteucci and Rodolphe Marie and Anders Kristensen and Taboryski, {Rafael J.}",
    year = "2012",
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    Østergaard, PF, Matteucci, M, Marie, R, Kristensen, A & Taboryski, RJ 2012, All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes. in Nanotech 2012 Vol. 2 Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational. vol. 2, pp. 482-485, Nanotech 2012, Santa Clara, United States, 18/06/2012.

    All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes. / Østergaard, Peter Friis; Matteucci, Marco; Marie, Rodolphe ; Kristensen, Anders; Taboryski, Rafael J.

    Nanotech 2012 Vol. 2 Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational. Vol. 2 2012. p. 482-485.

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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    T1 - All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes

    AU - Østergaard, Peter Friis

    AU - Matteucci, Marco

    AU - Marie, Rodolphe

    AU - Kristensen, Anders

    AU - Taboryski, Rafael J.

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    AB - Micro- and nanofluidic systems fabricated in silicon and glass substrates are expensive and have long production cycles. To minimize the time used by researchers to fabricate their systems, rather than using them, medium to high volume throughput of specific chips, containing fluidic channels in the micro- and nanoregime is required. To obtain this, injection molding is included in the research process for making several chips (100-1000) with the same layout. The time it takes for the individual chip to be fabricated in this way is much shorter than with conventional cleanroom methods, and the price is equally lower. Optimization of the final chip is explored, by looking at which aspects ratios are possible to obtain in polymer chips. Finally, signal to noise ratio of the chips used for fluorescent experiments is investigated, by an expected reduction of the excitation of fluorescent states in the polymer with the use of chips in different colors.

    KW - UV-LIGA

    KW - Nanoslits

    KW - Polymer Chips

    M3 - Article in proceedings

    SN - 978-1-4665-6275-2

    VL - 2

    SP - 482

    EP - 485

    BT - Nanotech 2012 Vol. 2 Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

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    Østergaard PF, Matteucci M, Marie R, Kristensen A, Taboryski RJ. All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes. In Nanotech 2012 Vol. 2 Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational. Vol. 2. 2012. p. 482-485