All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes

Peter Friis Østergaard, Marco Matteucci, Rodolphe Marie, Anders Kristensen, Rafael J. Taboryski

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


    Micro- and nanofluidic systems fabricated in silicon and glass substrates are expensive and have long production cycles. To minimize the time used by researchers to fabricate their systems, rather than using them, medium to high volume throughput of specific chips, containing fluidic channels in the micro- and nanoregime is required. To obtain this, injection molding is included in the research process for making several chips (100-1000) with the same layout. The time it takes for the individual chip to be fabricated in this way is much shorter than with conventional cleanroom methods, and the price is equally lower. Optimization of the final chip is explored, by looking at which aspects ratios are possible to obtain in polymer chips. Finally, signal to noise ratio of the chips used for fluorescent experiments is investigated, by an expected reduction of the excitation of fluorescent states in the polymer with the use of chips in different colors.
    Original languageEnglish
    Title of host publication Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
    Publication date2012
    ISBN (Print)978-1-4665-6275-2
    Publication statusPublished - 2012
    EventNanotech 2012: Conference & Expo - Santa Clara Convention Center, Santa Clara, United States
    Duration: 18 Jun 201221 Jun 2012
    Conference number: 15


    ConferenceNanotech 2012
    LocationSanta Clara Convention Center
    Country/TerritoryUnited States
    CitySanta Clara


    • UV-LIGA
    • Nanoslits
    • Polymer Chips


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    • Nanotech 2012

      Peter Friis Østergaard (Participant)

      20 Jun 2012

      Activity: Attending an eventParticipating in or organising a conference

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