All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing

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Abstract

We present the design, fabrication and characterization of a new all-optical frequency modulated pressure sensor. Using the tangential strain in a circular membrane, a waveguide with an integrated nanoscale Bragg grating is strained longitudinally proportional to the applied pressure causing a shift in the Bragg wavelength. The simple and robust design combined with the small chip area of 1 × 1.8 mm2 makes the sensor ideally suited for remote and distributed sensing in harsh environments and where miniaturized sensors are required. The sensor is designed for high pressure applications up to 350 bar and with a sensitivity of 4.8 pm/bar (i.e., 350 ×105 Pa and 4.8 × 10−5 pm/Pa, respectively).
Original languageEnglish
JournalSensors
Volume11
Issue number11
Pages (from-to)10615
ISSN1424-8220
DOIs
Publication statusPublished - 2011

Keywords

  • MEMS
  • Optical Sensor
  • Bragg Grating

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