Aggressive media exposed differential pressure sensor with a deposited membrane

Salim Bouaidat, Gert Friis Eriksen, Roger De Reus, Siebe Bouwstra

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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    Abstract

    A new piezoresistive differential pressure sensor design for harsh wet environments is presented. The sensor design is based on a deposited membrane, which is deposited on top of polysilicon interconnects and piezoresistors. Flat membrane surfaces are thereby achieved. This enables thin film protective coating using sputtered films, which usually have poor step coverage. The concept is demonstrated using both epipoly silicon and sputtered amorphous silicon as membrane materials and tantalum oxide as coating material. Using polysilicon piezoresistors, a sensitivity of 11.3 mV/V bar was obtained. Exposure of the sensors with sputtered amorphous silicon membranes to aggressive media with pH 11 and 70°C for 20 hours did not change their performance.
    Original languageEnglish
    Title of host publicationProceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems
    PublisherIEEE
    Publication date2001
    Pages155-158
    ISBN (Print)0-7803-5998-4
    DOIs
    Publication statusPublished - 2001
    Event14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland
    Duration: 21 Jan 200125 Jan 2001
    Conference number: 14

    Conference

    Conference14th IEEE International Conference on Micro Electro Mechanical Systems
    Number14
    Country/TerritorySwitzerland
    CityInterlaken
    Period21/01/200125/01/2001

    Bibliographical note

    Copyright: 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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