| Original language | English |
|---|---|
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 6 |
| Pages (from-to) | 58-62 |
| ISSN | 0960-1317 |
| Publication status | Published - 1996 |
AFM probes with directly fabricated tips
Anja Boisen, Ole Hansen, Siebe Bouwstra
Research output: Contribution to journal › Journal article › Research › peer-review