AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection

María Villarroya, Fransesc Pérez-Murano, Cristina Martín, Zachary James Davis, Anja Boisen, Jaume Esteve, Eduard Figueras, Josep Montserrat, Núria Barniol

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalNanotechnology
    Volume15
    Issue number7
    Pages (from-to)771–776
    ISSN0957-4484
    Publication statusPublished - 2004

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