Advances in the fabrication of cantilever-based sensors with the polymer SU-8

Stephan Urs Keller, Gabriela Blagoi, D. Haefliger, Anja Boisen

    Research output: Contribution to conferencePosterResearchpeer-review

    Original languageEnglish
    Publication date2008
    Publication statusPublished - 2008
    Event34th International Conference on Micro and Nano Engineering - Athens, Greece
    Duration: 15 Sep 200818 Sep 2008
    Conference number: 34

    Conference

    Conference34th International Conference on Micro and Nano Engineering
    Number34
    CountryGreece
    CityAthens
    Period15/09/200818/09/2008

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