Advances in the fabrication of cantilever-based sensors with the polymer SU-8

Stephan Urs Keller, Gabriela Blagoi, D. Haefliger, Anja Boisen

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication date	2008
Publication status	Published - 2008
Event	34th International Conference on Micro and Nano Engineering - Athens, Greece Duration: 15 Sept 2008 → 18 Sept 2008 Conference number: 34

Conference	34th International Conference on Micro and Nano Engineering
Number	34
Country/Territory	Greece
City	Athens
Period	15/09/2008 → 18/09/2008

OpenUrl availability

@conference{c2ee0734025644efa8efbfb21fb6af3c,

title = "Advances in the fabrication of cantilever-based sensors with the polymer SU-8",

author = "Keller, {Stephan Urs} and Gabriela Blagoi and D. Haefliger and Anja Boisen",

year = "2008",

language = "English",

note = "34th International Conference on Micro and Nano Engineering, MNE '08 ; Conference date: 15-09-2008 Through 18-09-2008",

}