Advances in the chemical vapor deposition (CVD) of Tantalum

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Original language	English
Publication date	2014
Media of output	PowerPoint
Publication status	Published - 2014
Event	247th ACS National Meeting: Chemistry & Materials for Energy - Omni Hotel, Dallas, United States Duration: 16 Mar 2014 → 20 Mar 2014 Conference number: 247

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@misc{9870f81cfc37438dbf5d55669260ca0a,

title = "Advances in the chemical vapor deposition (CVD) of Tantalum",

author = "Mugabi, \{James Atwoki\} and Niels Bjerrum and Irina Petrushina and S{\o}ren Eriksen and Erik Christensen",

year = "2014",

language = "English",

note = "247th ACS National Meeting : Chemistry \& Materials for Energy, ACS ; Conference date: 16-03-2014 Through 20-03-2014",

}