Advanced fabrication of hyperbolic metamaterials

Evgeniy Shkondin, Johneph Sukham, Mohammad Esmail Aryaee Panah, Osamu Takayama, Radu Malureanu, Flemming Jensen, Andrei Lavrinenko*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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Abstract

Hyperbolic metamaterials can provide unprecedented properties in accommodation of high-k (high wave vector) waves and enhancement of the optical density of states. To reach such performance the metamaterials have to be fabricated with as small imperfections as possible. Here we report on our advances in two approaches in fabrication of optical metamaterials. We deposit ultrathin ultrasmooth gold layers with the assistance of organic material (APTMS) adhesion layer. The technology supports the stacking of such layers in a multiperiod construction with alumina spacers between gold films, which is expected to exhibit hyperbolic properties in the visible range. As the second approach we apply the atomic layer deposition technique to arrange vertical alignment of layers or pillars of heavily doped ZnO or TiN, which enables us to produce hyperbolic metamaterials for the near- and mid-infrared ranges.

Original languageEnglish
Title of host publicationProceedings of International Conference on Metamaterials and Nanophotonics, METANANO 2017
Number of pages4
Volume1874
PublisherAmerican Institute of Physics Inc.
Publication date14 Sep 2017
Article number020004
ISBN (Electronic)9780735415546
DOIs
Publication statusPublished - 14 Sep 2017
Event2017 International Conference on Metamaterials and Nanophotonics - Vladivostok, Russian Federation
Duration: 18 Sep 201722 Sep 2017

Conference

Conference2017 International Conference on Metamaterials and Nanophotonics
CountryRussian Federation
CityVladivostok
Period18/09/201722/09/2017
SeriesA I P Conference Proceedings Series
Volume1874
ISSN0094-243X

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