Advanced characterization of carrier profiles in germanium using micro-machined contact probes

T. Clarysse, M. Konttinen, B. Parmentier, A. Moussa, W. Vandervorst, G. Impellizzeri, E. Napolitani, V. Privitera, Peter Folmer Nielsen, Dirch Hjorth Petersen, Ole Hansen

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Physics & Astronomy