Addressing the mechanical deformation of flexible stamps for nanoimprint lithography on double-curved surfaces

Mads Rostgaard Sonne, Jesper Henri Hattel, Anders Kristensen

Research output: Contribution to conferencePosterResearch

94 Downloads (Pure)
Original languageEnglish
Publication date2012
Publication statusPublished - 2012
EventNNT 2012: 11th International Conference on Nanoimprint and Nanoprint Technology 2012 - Napa, CA, United States
Duration: 24 Oct 201226 Oct 2012


ConferenceNNT 2012
CountryUnited States
CityNapa, CA
Internet address

Bibliographical note

Fabrication of the master silicon stamp and the flexible stamp was performed by NIL Technology ApS, a partner in the NANOPLAST project. This work is financially supported by The Danish National Advanced Technology Foundation, which is highly acknowledged.

Cite this