Addressing the mechanical deformation of flexible stamps for nanoimprint lithography on double-curved surfaces

Mads Rostgaard Sonne, Jesper Henri Hattel, Anders Kristensen

Research output: Contribution to conferencePosterResearch

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Original languageEnglish
Publication date2012
Publication statusPublished - 2012
EventNNT 2012: 11th International Conference on Nanoimprint and Nanoprint Technology 2012 - Napa, CA, United States
Duration: 24 Oct 201226 Oct 2012
http://www.nntconf.org/

Conference

ConferenceNNT 2012
CountryUnited States
CityNapa, CA
Period24/10/201226/10/2012
Internet address

Bibliographical note

Fabrication of the master silicon stamp and the flexible stamp was performed by NIL Technology ApS, a partner in the NANOPLAST project. This work is financially supported by The Danish National Advanced Technology Foundation, which is highly acknowledged.

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