Accurate microfour-point probe sheet resistance measurements on small samples

Sune Thorsteinsson, Fei Wang, Dirch Hjorth Petersen, Torben Mikael Hansen, Daniel Kjær, Rong Lin, Jang-Yong Kim, Peter Folmer Nielsen, Ole Hansen

Research output: Contribution to journalJournal articleResearchpeer-review

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Abstract

We show that accurate sheet resistance measurements on small samples may be performed using microfour-point probes without applying correction factors. Using dual configuration measurements, the sheet resistance may be extracted with high accuracy when the microfour-point probes are in proximity of a mirror plane on small samples with dimensions of a few times the probe pitch. We calculate theoretically the size of the “sweet spot,” where sufficiently accurate sheet resistances result and show that even for very small samples it is feasible to do correction free extraction of the sheet resistance with sufficient accuracy. As an example, the sheet resistance of a 40 µm (50 µm) square sample may be characterized with an accuracy of 0.3% (0.1%) using a 10 µm pitch microfour-point probe and assuming a probe alignment accuracy of ±2.5 µm. ©2009 American Institute of Physics
Original languageEnglish
JournalReview of Scientific Instruments
Volume80
Issue number5
Pages (from-to)053902
ISSN0034-6748
DOIs
Publication statusPublished - 2009

Bibliographical note

Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Keywords

  • microelectrodes
  • electric resistance measurement
  • micromechanical devices
  • probes

Cite this

Thorsteinsson, Sune ; Wang, Fei ; Petersen, Dirch Hjorth ; Hansen, Torben Mikael ; Kjær, Daniel ; Lin, Rong ; Kim, Jang-Yong ; Nielsen, Peter Folmer ; Hansen, Ole. / Accurate microfour-point probe sheet resistance measurements on small samples. In: Review of Scientific Instruments. 2009 ; Vol. 80, No. 5. pp. 053902.
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abstract = "We show that accurate sheet resistance measurements on small samples may be performed using microfour-point probes without applying correction factors. Using dual configuration measurements, the sheet resistance may be extracted with high accuracy when the microfour-point probes are in proximity of a mirror plane on small samples with dimensions of a few times the probe pitch. We calculate theoretically the size of the “sweet spot,” where sufficiently accurate sheet resistances result and show that even for very small samples it is feasible to do correction free extraction of the sheet resistance with sufficient accuracy. As an example, the sheet resistance of a 40 µm (50 µm) square sample may be characterized with an accuracy of 0.3{\%} (0.1{\%}) using a 10 µm pitch microfour-point probe and assuming a probe alignment accuracy of ±2.5 µm. {\circledC}2009 American Institute of Physics",
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author = "Sune Thorsteinsson and Fei Wang and Petersen, {Dirch Hjorth} and Hansen, {Torben Mikael} and Daniel Kj{\ae}r and Rong Lin and Jang-Yong Kim and Nielsen, {Peter Folmer} and Ole Hansen",
note = "Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.",
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Accurate microfour-point probe sheet resistance measurements on small samples. / Thorsteinsson, Sune; Wang, Fei; Petersen, Dirch Hjorth; Hansen, Torben Mikael; Kjær, Daniel; Lin, Rong; Kim, Jang-Yong; Nielsen, Peter Folmer; Hansen, Ole.

In: Review of Scientific Instruments, Vol. 80, No. 5, 2009, p. 053902.

Research output: Contribution to journalJournal articleResearchpeer-review

TY - JOUR

T1 - Accurate microfour-point probe sheet resistance measurements on small samples

AU - Thorsteinsson, Sune

AU - Wang, Fei

AU - Petersen, Dirch Hjorth

AU - Hansen, Torben Mikael

AU - Kjær, Daniel

AU - Lin, Rong

AU - Kim, Jang-Yong

AU - Nielsen, Peter Folmer

AU - Hansen, Ole

N1 - Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

PY - 2009

Y1 - 2009

N2 - We show that accurate sheet resistance measurements on small samples may be performed using microfour-point probes without applying correction factors. Using dual configuration measurements, the sheet resistance may be extracted with high accuracy when the microfour-point probes are in proximity of a mirror plane on small samples with dimensions of a few times the probe pitch. We calculate theoretically the size of the “sweet spot,” where sufficiently accurate sheet resistances result and show that even for very small samples it is feasible to do correction free extraction of the sheet resistance with sufficient accuracy. As an example, the sheet resistance of a 40 µm (50 µm) square sample may be characterized with an accuracy of 0.3% (0.1%) using a 10 µm pitch microfour-point probe and assuming a probe alignment accuracy of ±2.5 µm. ©2009 American Institute of Physics

AB - We show that accurate sheet resistance measurements on small samples may be performed using microfour-point probes without applying correction factors. Using dual configuration measurements, the sheet resistance may be extracted with high accuracy when the microfour-point probes are in proximity of a mirror plane on small samples with dimensions of a few times the probe pitch. We calculate theoretically the size of the “sweet spot,” where sufficiently accurate sheet resistances result and show that even for very small samples it is feasible to do correction free extraction of the sheet resistance with sufficient accuracy. As an example, the sheet resistance of a 40 µm (50 µm) square sample may be characterized with an accuracy of 0.3% (0.1%) using a 10 µm pitch microfour-point probe and assuming a probe alignment accuracy of ±2.5 µm. ©2009 American Institute of Physics

KW - microelectrodes

KW - electric resistance measurement

KW - micromechanical devices

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U2 - 10.1063/1.3125050

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JO - Review of Scientific Instruments

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