Accuracy optimization of high-speed AFM measurements using Design of Experiments

Guido Tosello (Invited author), F. Marinello (Invited author), Hans Nørgaard Hansen (Invited author), A. Antico (Invited author)

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

Atomic Force Microscopy (AFM) is being increasingly employed in industrial micro/nano manufacturing applications and integrated into production lines. In order to achieve reliable process and product control at high measuring speed, instrument optimization is needed. Quantitative AFM measurement results are influenced by a number of scan settings parameters, defining topography sampling and measurement time: resolution (number of profiles and points per profile), scan range and direction, scanning force and speed. Such parameters are influencing lateral and vertical accuracy and, eventually, the estimated dimensions of measured features. The definition of scan settings is based on a comprehensive optimization that targets maximization of information from collected data and minimization of measurement uncertainty and scan time. The Design of Experiments (DOE) technique is proposed and applied to perform the optimization of AFM measurements on calibrated one-dimensional silicon grating featuring a triangular periodical profile (slopes of 54.7 degrees, period of 3 μm).
Original languageEnglish
Title of host publicationProceedings of the euspen International Conference
Publication date2010
Pages172-175
Publication statusPublished - 2010
Event10th International Conference of the European Society for Precision Engineering and Nanotechnology - Zürich, Switzerland
Duration: 18 May 200822 May 2008
Conference number: 10

Conference

Conference10th International Conference of the European Society for Precision Engineering and Nanotechnology
Number10
CountrySwitzerland
CityZürich
Period18/05/200822/05/2008

Cite this

Tosello, G., Marinello, F., Hansen, H. N., & Antico, A. (2010). Accuracy optimization of high-speed AFM measurements using Design of Experiments. In Proceedings of the euspen International Conference (pp. 172-175)