Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study

Fei Wang, Dirch Hjorth Petersen, Frederik Westergaard Østerberg, Ole Hansen

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    Abstract

    In this paper, we discuss a probe spacing dependence study in order to estimate the accuracy of micro four-point probe measurements on inhomogeneous samples. Based on sensitivity calculations, both sheet resistance and Hall effect measurements are studied for samples (e.g. laser annealed samples) with periodic variations of sheet resistance, sheet carrier density, and carrier mobility. With a variation wavelength of ¿, probe spacings from 0.0012 to 1002 have been applied to characterize the local variations. The calculations show that the measurement error is highly dependent on the probe spacing. When the probe spacing is smaller than 1/40 of the variation wavelength, micro four-point probes can provide an accurate record of local properties with less than 1% measurement error. All the calculations agree well with previous experimental results.
    Original languageEnglish
    Title of host publication17th International Conference on Advanced Thermal Processing of Semiconductors, 2009. RTP '09
    PublisherIEEE
    Publication date2009
    Pages1-6
    ISBN (Print)978-1-4244-3814-3
    DOIs
    Publication statusPublished - 2009
    Event17th International Conference on Advanced Thermal Processing of Semiconductors RTP09 - Albany, United States
    Duration: 29 Sep 20092 Oct 2009
    Conference number: 17

    Conference

    Conference17th International Conference on Advanced Thermal Processing of Semiconductors RTP09
    Number17
    CountryUnited States
    CityAlbany
    Period29/09/200902/10/2009

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