Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study

Fei Wang; Dirch Hjorth Petersen; Frederik Westergaard Østerberg; Ole Hansen

doi:10.1109/RTP.2009.5373449

Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study

Fei Wang, Dirch Hjorth Petersen, Frederik Westergaard Østerberg, Ole Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

442 Downloads (Pure)

Abstract

In this paper, we discuss a probe spacing dependence study in order to estimate the accuracy of micro four-point probe measurements on inhomogeneous samples. Based on sensitivity calculations, both sheet resistance and Hall effect measurements are studied for samples (e.g. laser annealed samples) with periodic variations of sheet resistance, sheet carrier density, and carrier mobility. With a variation wavelength of Â¿, probe spacings from 0.0012 to 1002 have been applied to characterize the local variations. The calculations show that the measurement error is highly dependent on the probe spacing. When the probe spacing is smaller than 1/40 of the variation wavelength, micro four-point probes can provide an accurate record of local properties with less than 1% measurement error. All the calculations agree well with previous experimental results.

Original language	English
Title of host publication	17th International Conference on Advanced Thermal Processing of Semiconductors, 2009. RTP '09
Publisher	IEEE
Publication date	2009
Pages	1-6
ISBN (Print)	978-1-4244-3814-3
DOIs	https://doi.org/10.1109/RTP.2009.5373449
Publication status	Published - 2009
Event	17th International Conference on Advanced Thermal Processing of Semiconductors RTP09 - Albany, United States Duration: 29 Sept 2009 → 2 Oct 2009 Conference number: 17

Conference

Conference	17th International Conference on Advanced Thermal Processing of Semiconductors RTP09
Number	17
Country/Territory	United States
City	Albany
Period	29/09/2009 → 02/10/2009

Bibliographical note

Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Access to Document

10.1109/RTP.2009.5373449

WangFinal published version, 452 KB

OpenUrl availability

Full text

Cite this

@inproceedings{7e742badb88e49139a5db36e2e4b5cd3,

title = "Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study",

abstract = "In this paper, we discuss a probe spacing dependence study in order to estimate the accuracy of micro four-point probe measurements on inhomogeneous samples. Based on sensitivity calculations, both sheet resistance and Hall effect measurements are studied for samples (e.g. laser annealed samples) with periodic variations of sheet resistance, sheet carrier density, and carrier mobility. With a variation wavelength of {\^A}¿, probe spacings from 0.0012 to 1002 have been applied to characterize the local variations. The calculations show that the measurement error is highly dependent on the probe spacing. When the probe spacing is smaller than 1/40 of the variation wavelength, micro four-point probes can provide an accurate record of local properties with less than 1% measurement error. All the calculations agree well with previous experimental results.",

author = "Fei Wang and Petersen, {Dirch Hjorth} and {\O}sterberg, {Frederik Westergaard} and Ole Hansen",

note = "Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.; 17th International Conference on Advanced Thermal Processing of Semiconductors RTP09 ; Conference date: 29-09-2009 Through 02-10-2009",

year = "2009",

doi = "10.1109/RTP.2009.5373449",

language = "English",

isbn = "978-1-4244-3814-3",

pages = "1--6",

booktitle = "17th International Conference on Advanced Thermal Processing of Semiconductors, 2009. RTP '09",

publisher = "IEEE",

address = "United States",

}

Wang, F, Petersen, DH, Østerberg, FW & Hansen, O 2009, Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study. in 17th International Conference on Advanced Thermal Processing of Semiconductors, 2009. RTP '09. IEEE, pp. 1-6, 17th International Conference on Advanced Thermal Processing of Semiconductors RTP09, Albany, New York, United States, 29/09/2009. https://doi.org/10.1109/RTP.2009.5373449

Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study. / Wang, Fei; Petersen, Dirch Hjorth; Østerberg, Frederik Westergaard et al.
17th International Conference on Advanced Thermal Processing of Semiconductors, 2009. RTP '09. IEEE, 2009. p. 1-6.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study

AU - Wang, Fei

AU - Petersen, Dirch Hjorth

AU - Østerberg, Frederik Westergaard

AU - Hansen, Ole

N1 - Conference code: 17

PY - 2009

Y1 - 2009

N2 - In this paper, we discuss a probe spacing dependence study in order to estimate the accuracy of micro four-point probe measurements on inhomogeneous samples. Based on sensitivity calculations, both sheet resistance and Hall effect measurements are studied for samples (e.g. laser annealed samples) with periodic variations of sheet resistance, sheet carrier density, and carrier mobility. With a variation wavelength of Â¿, probe spacings from 0.0012 to 1002 have been applied to characterize the local variations. The calculations show that the measurement error is highly dependent on the probe spacing. When the probe spacing is smaller than 1/40 of the variation wavelength, micro four-point probes can provide an accurate record of local properties with less than 1% measurement error. All the calculations agree well with previous experimental results.

AB - In this paper, we discuss a probe spacing dependence study in order to estimate the accuracy of micro four-point probe measurements on inhomogeneous samples. Based on sensitivity calculations, both sheet resistance and Hall effect measurements are studied for samples (e.g. laser annealed samples) with periodic variations of sheet resistance, sheet carrier density, and carrier mobility. With a variation wavelength of Â¿, probe spacings from 0.0012 to 1002 have been applied to characterize the local variations. The calculations show that the measurement error is highly dependent on the probe spacing. When the probe spacing is smaller than 1/40 of the variation wavelength, micro four-point probes can provide an accurate record of local properties with less than 1% measurement error. All the calculations agree well with previous experimental results.

U2 - 10.1109/RTP.2009.5373449

DO - 10.1109/RTP.2009.5373449

M3 - Article in proceedings

SN - 978-1-4244-3814-3

SP - 1

EP - 6

BT - 17th International Conference on Advanced Thermal Processing of Semiconductors, 2009. RTP '09

PB - IEEE

T2 - 17th International Conference on Advanced Thermal Processing of Semiconductors RTP09

Y2 - 29 September 2009 through 2 October 2009

ER -

Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study

Abstract

Conference

Bibliographical note

Access to Document

OpenUrl availability

Fingerprint

Cite this