Absorbance Measurements in the UV-range in Microsystems using Silicon Oxynitride Waveguides

Klaus Bo Mogensen, Peter Friis, Jörg Hübner, Pieter Telleman, Jörg Peter Kutter

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of Eurosensors XIV
Place of PublicationCopenhagen, Denmark
Publication date2000
Publication statusPublished - 2000

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