A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications

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Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800-1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform.

Original languageEnglish
Article number255
JournalApplied Sciences (Switzerland)
Issue number2
Number of pages16
Publication statusPublished - 11 Jan 2019
CitationsWeb of Science® Times Cited: No match on DOI

    Research areas

  • Beam steering, Coarse Wavelength Division Multiplexing (CWDM), Frequency comb, Grating coupler, Kerr nonlinearity, LIDAR, Multiplexing, Optical phased array, Silicon nitride, Silicon photonics, Transceiver

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