A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications

Quentin Wilmart*, Houssein El Dirani, Nicola Tyler, Daivid Fowler, Stéphane Malhouitre, Stéphanie Garcia, Marco Casale, Sébastien Kerdiles, Karim Hassan, Christelle Monat, Xavier Letartre, Ayman Kamel, Minhao Pu, Kresten Yvind, Leif Katsuo Oxenløwe, Wilfried Rabaud, Corrado Sciancalepore, Bertrand Szelag, Ségolène Olivier

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

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Abstract

Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800-1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform.

Original languageEnglish
Article number255
JournalApplied Sciences (Switzerland)
Volume9
Issue number2
Number of pages16
DOIs
Publication statusPublished - 11 Jan 2019

Keywords

  • Beam steering
  • Coarse Wavelength Division Multiplexing (CWDM)
  • Frequency comb
  • Grating coupler
  • Kerr nonlinearity
  • LIDAR
  • Multiplexing
  • Optical phased array
  • Silicon nitride
  • Silicon photonics
  • Transceiver

Cite this

Wilmart, Q., El Dirani, H., Tyler, N., Fowler, D., Malhouitre, S., Garcia, S., ... Olivier, S. (2019). A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications. Applied Sciences (Switzerland), 9(2), [255]. https://doi.org/10.3390/app9020255
Wilmart, Quentin ; El Dirani, Houssein ; Tyler, Nicola ; Fowler, Daivid ; Malhouitre, Stéphane ; Garcia, Stéphanie ; Casale, Marco ; Kerdiles, Sébastien ; Hassan, Karim ; Monat, Christelle ; Letartre, Xavier ; Kamel, Ayman ; Pu, Minhao ; Yvind, Kresten ; Oxenløwe, Leif Katsuo ; Rabaud, Wilfried ; Sciancalepore, Corrado ; Szelag, Bertrand ; Olivier, Ségolène. / A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications. In: Applied Sciences (Switzerland). 2019 ; Vol. 9, No. 2.
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title = "A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications",
abstract = "Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800-1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform.",
keywords = "Beam steering, Coarse Wavelength Division Multiplexing (CWDM), Frequency comb, Grating coupler, Kerr nonlinearity, LIDAR, Multiplexing, Optical phased array, Silicon nitride, Silicon photonics, Transceiver",
author = "Quentin Wilmart and {El Dirani}, Houssein and Nicola Tyler and Daivid Fowler and St{\'e}phane Malhouitre and St{\'e}phanie Garcia and Marco Casale and S{\'e}bastien Kerdiles and Karim Hassan and Christelle Monat and Xavier Letartre and Ayman Kamel and Minhao Pu and Kresten Yvind and Oxenl{\o}we, {Leif Katsuo} and Wilfried Rabaud and Corrado Sciancalepore and Bertrand Szelag and S{\'e}gol{\`e}ne Olivier",
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Wilmart, Q, El Dirani, H, Tyler, N, Fowler, D, Malhouitre, S, Garcia, S, Casale, M, Kerdiles, S, Hassan, K, Monat, C, Letartre, X, Kamel, A, Pu, M, Yvind, K, Oxenløwe, LK, Rabaud, W, Sciancalepore, C, Szelag, B & Olivier, S 2019, 'A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications', Applied Sciences (Switzerland), vol. 9, no. 2, 255. https://doi.org/10.3390/app9020255

A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications. / Wilmart, Quentin; El Dirani, Houssein; Tyler, Nicola; Fowler, Daivid; Malhouitre, Stéphane; Garcia, Stéphanie; Casale, Marco; Kerdiles, Sébastien; Hassan, Karim; Monat, Christelle; Letartre, Xavier; Kamel, Ayman; Pu, Minhao; Yvind, Kresten; Oxenløwe, Leif Katsuo; Rabaud, Wilfried; Sciancalepore, Corrado; Szelag, Bertrand; Olivier, Ségolène.

In: Applied Sciences (Switzerland), Vol. 9, No. 2, 255, 11.01.2019.

Research output: Contribution to journalJournal articleResearchpeer-review

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T1 - A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications

AU - Wilmart, Quentin

AU - El Dirani, Houssein

AU - Tyler, Nicola

AU - Fowler, Daivid

AU - Malhouitre, Stéphane

AU - Garcia, Stéphanie

AU - Casale, Marco

AU - Kerdiles, Sébastien

AU - Hassan, Karim

AU - Monat, Christelle

AU - Letartre, Xavier

AU - Kamel, Ayman

AU - Pu, Minhao

AU - Yvind, Kresten

AU - Oxenløwe, Leif Katsuo

AU - Rabaud, Wilfried

AU - Sciancalepore, Corrado

AU - Szelag, Bertrand

AU - Olivier, Ségolène

PY - 2019/1/11

Y1 - 2019/1/11

N2 - Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800-1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform.

AB - Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800-1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform.

KW - Beam steering

KW - Coarse Wavelength Division Multiplexing (CWDM)

KW - Frequency comb

KW - Grating coupler

KW - Kerr nonlinearity

KW - LIDAR

KW - Multiplexing

KW - Optical phased array

KW - Silicon nitride

KW - Silicon photonics

KW - Transceiver

U2 - 10.3390/app9020255

DO - 10.3390/app9020255

M3 - Journal article

VL - 9

JO - Applied Sciences

JF - Applied Sciences

SN - 2076-3417

IS - 2

M1 - 255

ER -