A suspended focusing Si3N4 metamirror for integrated cavity optomechanics

Aman R. Agrawal; Jack P. Manley; Daniel Allepuz-Requena; Dalziel J. Wilson

doi:10.1364/FIO.2023.FTh3B.4

A suspended focusing Si₃N₄ metamirror for integrated cavity optomechanics

Aman R. Agrawal^*
, Jack P. Manley
, Daniel Allepuz-Requena
, Dalziel J. Wilson

^*Corresponding author for this work

University of Arizona

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

We have realized a suspended, high-reflectivity focusing metamirror (f = 10 cm, R ≈ 99%), by gradient pitch photonic crystal patterning of a Si₃N₄ membrane. The design enables construction of stable, ultra-short (L = 30 µm), high-finesse (F > 200) cavities for optomechanical sensing and quantum experiments.

Original language	English
Title of host publication	Frontiers in Optics : Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023
Number of pages	2
Publisher	Optical Society of America
Publication date	2023
ISBN (Electronic)	9781957171296
DOIs	https://doi.org/10.1364/FIO.2023.FTh3B.4
Publication status	Published - 2023
Event	Frontiers in Optics + Laser Science 2023: Part of Frontiers in Optics + Laser Science 2023 - Tacoma, United States Duration: 9 Oct 2023 → 12 Oct 2023

Conference

Conference	Frontiers in Optics + Laser Science 2023
Country/Territory	United States
City	Tacoma
Period	09/10/2023 → 12/10/2023

Access to Document

10.1364/FIO.2023.FTh3B.4

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Cite this

@inproceedings{44c9e862a91a4ff6af354e1dea4240e5,

title = "A suspended focusing Si3N4 metamirror for integrated cavity optomechanics",

abstract = "We have realized a suspended, high-reflectivity focusing metamirror (f = 10 cm, R ≈ 99\%), by gradient pitch photonic crystal patterning of a Si3N4 membrane. The design enables construction of stable, ultra-short (L = 30 µm), high-finesse (F > 200) cavities for optomechanical sensing and quantum experiments.",

author = "Agrawal, \{Aman R.\} and Manley, \{Jack P.\} and Daniel Allepuz-Requena and Wilson, \{Dalziel J.\}",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2023, {\textcopyright} 2023 The Author(s); Frontiers in Optics + Laser Science 2023 : Part of Frontiers in Optics + Laser Science 2023, FiO, LS 2023 ; Conference date: 09-10-2023 Through 12-10-2023",

year = "2023",

doi = "10.1364/FIO.2023.FTh3B.4",

language = "English",

booktitle = "Frontiers in Optics",

publisher = "Optical Society of America",

}

Agrawal, AR, Manley, JP, Allepuz-Requena, D & Wilson, DJ 2023, A suspended focusing Si₃N₄ metamirror for integrated cavity optomechanics. in Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023. Optical Society of America, Frontiers in Optics + Laser Science 2023, Tacoma, Washington, United States, 09/10/2023. https://doi.org/10.1364/FIO.2023.FTh3B.4

A suspended focusing Si₃N₄ metamirror for integrated cavity optomechanics. / Agrawal, Aman R.; Manley, Jack P.; Allepuz-Requena, Daniel et al.
Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023. Optical Society of America, 2023.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - A suspended focusing Si3N4 metamirror for integrated cavity optomechanics

AU - Agrawal, Aman R.

AU - Manley, Jack P.

AU - Allepuz-Requena, Daniel

AU - Wilson, Dalziel J.

PY - 2023

Y1 - 2023

N2 - We have realized a suspended, high-reflectivity focusing metamirror (f = 10 cm, R ≈ 99%), by gradient pitch photonic crystal patterning of a Si3N4 membrane. The design enables construction of stable, ultra-short (L = 30 µm), high-finesse (F > 200) cavities for optomechanical sensing and quantum experiments.

AB - We have realized a suspended, high-reflectivity focusing metamirror (f = 10 cm, R ≈ 99%), by gradient pitch photonic crystal patterning of a Si3N4 membrane. The design enables construction of stable, ultra-short (L = 30 µm), high-finesse (F > 200) cavities for optomechanical sensing and quantum experiments.

U2 - 10.1364/FIO.2023.FTh3B.4

DO - 10.1364/FIO.2023.FTh3B.4

M3 - Article in proceedings

AN - SCOPUS:85191179155

BT - Frontiers in Optics

PB - Optical Society of America

T2 - Frontiers in Optics + Laser Science 2023

Y2 - 9 October 2023 through 12 October 2023

ER -