A study on the surface roughness of a thin HSQ coating on a fine milled surface

Kamran Mohaghegh, Hans Nørgaard Hansen, Henrik Pranov, Guggi Kofod

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Abstract

The paper discusses a novel application of a thin layer coating on a metallic machined surface with particular attention to roughness of the coating compared to the original surface before coating. The coating is a nominally 1 μm film of Hydrogen Silsesquioxane (HSQ) which is commonly used in the semiconductor industry in the manufacture of integrated circuits. The work piece is a fine peripheral-milled tool steel surface which is widely used in industrial applications. Roughness improvement after the application of HSQ coating is reported.
Original languageEnglish
Title of host publicationProceedings of the 14th euspen International Conference
Number of pages4
Publishereuspen
Publication date2014
Publication statusPublished - 2014
Event14th International Conference of the European Society for Precision Engineering and Nanotechnology - Valamar Lacroma Hotel, Dubrovnik, Croatia
Duration: 2 Jun 20146 Jun 2014
Conference number: 14

Conference

Conference14th International Conference of the European Society for Precision Engineering and Nanotechnology
Number14
LocationValamar Lacroma Hotel
CountryCroatia
CityDubrovnik
Period02/06/201406/06/2014

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