A statistical approach for measuring dislocations in 2D photonic crystals

Radu Malureanu, Lars Hagedorn Frandsen

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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Abstract

In this paper, a comparison between the placement accuracy of lattice atoms in photonic crystal structures fabricated with different lithographic techniques is made. Using atomic force microscopy measurements and self-developed algorithms for calculating the holes position within less than 0.01nm error, we establish the statistical disorder within such devices.
Original languageEnglish
Title of host publicationInternational Conference on Nanoscience and Nanotechnology
Place of PublicationMelbourne, Australia
PublisherIEEE
Publication date2008
Pages200-202
ISBN (Print)14-24-41503-9
DOIs
Publication statusPublished - 2008
EventInternational Conference on Nanoscience and Nanotechnology - Melbourne, Australia
Duration: 1 Jan 2008 → …

Conference

ConferenceInternational Conference on Nanoscience and Nanotechnology
CityMelbourne, Australia
Period01/01/2008 → …

Bibliographical note

Copyright: 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

Keywords

  • placement accuracy
  • AFM measures
  • photonic crystals

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