Skip to main navigation Skip to search Skip to main content

A simple way of measuring beam skirt profiles in low vacuum SEMs

  • Jørgen Bilde-Sørensen
  • , Yi-Lin Liu

    Research output: Contribution to conference › Conference abstract for conference › Research

    Original languageEnglish
    Publication date2002
    Publication statusPublished - 2002
    EventNoran Danish user meeting - Aalborg, Denmark
    Duration: 17 Sept 2002 → 17 Sept 2002

    Other

    OtherNoran Danish user meeting
    Country/TerritoryDenmark
    CityAalborg
    Period17/09/2002 → 17/09/2002

    OpenUrl availability

    Check availability in DTU Findit

    Cite this