A simple way of measuring beam skirt profiles in low vacuum SEMs

Jørgen Bilde-Sørensen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research

Original language	English
Title of host publication	Proceedings
Editors	J. Keränen, Sillanpää
Place of Publication	Tampere
Publisher	Scandinavian Society for Electron Microscopy
Publication date	2002
Pages	100-101
Publication status	Published - 2002
Event	SCANDEM 2002 - Tampere, Finland Duration: 12 Jun 2002 → 15 Jun 2002 Conference number: 53

OpenUrl availability

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title = "A simple way of measuring beam skirt profiles in low vacuum SEMs",

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author = "J{\o}rgen Bilde-S{\o}rensen",

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note = "SCANDEM 2002, SCANDEM 2002 ; Conference date: 12-06-2002 Through 15-06-2002",

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AU - Bilde-Sørensen, Jørgen

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M3 - Article in proceedings

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BT - Proceedings

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PB - Scandinavian Society for Electron Microscopy

CY - Tampere

T2 - SCANDEM 2002

Y2 - 12 June 2002 through 15 June 2002

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