A simple way of measuring beam skirt profiles in low vacuum SEMs

Jørgen Bilde-Sørensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

    Original languageEnglish
    Title of host publicationProceedings
    EditorsJ. Keränen, Sillanpää
    Place of PublicationTampere
    PublisherScandinavian Society for Electron Microscopy
    Publication date2002
    Pages100-101
    Publication statusPublished - 2002
    EventSCANDEM 2002 - Tampere, Finland
    Duration: 12 Jun 200215 Jun 2002
    Conference number: 53

    Conference

    ConferenceSCANDEM 2002
    Number53
    CountryFinland
    CityTampere
    Period12/06/200215/06/2002

    Cite this

    Bilde-Sørensen, J. (2002). A simple way of measuring beam skirt profiles in low vacuum SEMs. In J. Keränen, & Sillanpää (Eds.), Proceedings (pp. 100-101). Scandinavian Society for Electron Microscopy.