A resonant hollow MEMS device for multi‐dimension analysis

Peter Emil Larsen, Marlitt Viehrig, Anja Boisen

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2018
Publication status	Published - 2018
Event	44th International conference on Micro and Nano Engineering - Copenhagen, Denmark Duration: 24 Sept 2018 → 27 Sept 2018 Conference number: 44 http://mne2018.org

Conference	44th International conference on Micro and Nano Engineering
Number	44
Country/Territory	Denmark
City	Copenhagen
Period	24/09/2018 → 27/09/2018
Internet address	http://mne2018.org

Keywords

@conference{3372a44d856649888802f0838ef5f2b0,

title = "A resonant hollow MEMS device for multi‐dimension analysis",

keywords = "Hollow MEMS, Resonator, Single cell, IR absorbtion",

author = "Larsen, {Peter Emil} and Marlitt Viehrig and Anja Boisen",

year = "2018",

language = "English",

note = "44th International conference on Micro and Nano Engineering, MNE 2018 ; Conference date: 24-09-2018 Through 27-09-2018",

url = "http://mne2018.org",

}

TY - ABST

T1 - A resonant hollow MEMS device for multi‐dimension analysis

AU - Larsen, Peter Emil

AU - Viehrig, Marlitt

AU - Boisen, Anja

N1 - Conference code: 44

PY - 2018

Y1 - 2018

KW - Hollow MEMS

KW - Resonator

KW - Single cell

KW - IR absorbtion

M3 - Conference abstract for conference

T2 - 44th International conference on Micro and Nano Engineering

Y2 - 24 September 2018 through 27 September 2018

ER -