A resonant hollow MEMS device for multi‐dimension analysis

Peter Emil Larsen, Marlitt Viehrig, Anja Boisen

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

43 Downloads (Pure)
Original languageEnglish
Publication date2018
Publication statusPublished - 2018
Event44th International conference on Micro and Nano Engineering - Copenhagen, Denmark
Duration: 24 Sep 201827 Sep 2018
Conference number: 44
http://mne2018.org

Conference

Conference44th International conference on Micro and Nano Engineering
Number44
CountryDenmark
CityCopenhagen
Period24/09/201827/09/2018
Internet address

Keywords

  • Hollow MEMS
  • Resonator
  • Single cell
  • IR absorbtion

Cite this

Larsen, P. E., Viehrig, M., & Boisen, A. (2018). A resonant hollow MEMS device for multi‐dimension analysis. Abstract from 44th International conference on Micro and Nano Engineering, Copenhagen, Denmark.