A piezoelectric triaxial accelerometer

Patrick Scheeper; Jens Gulløv

doi:10.1088/0960-1317/6/1/032

A piezoelectric triaxial accelerometer

Patrick Scheeper, Jens Gulløv

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

A new piezoelectric silicon accelerometer design is presented. The design allows sensing in three directions. The accelerometer is designed to have a detection level of 10^-3 m s^-2 Hz^-1/2 and a resonance frequency of 10 kHz.

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	6
Issue number	1
Pages (from-to)	131-133
ISSN	0960-1317
DOIs	https://doi.org/10.1088/0960-1317/6/1/032
Publication status	Published - 1996

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title = "A piezoelectric triaxial accelerometer",

abstract = "A new piezoelectric silicon accelerometer design is presented. The design allows sensing in three directions. The accelerometer is designed to have a detection level of 10-3 m s-2 Hz-1/2 and a resonance frequency of 10 kHz.",

author = "Patrick Scheeper and Jens Gull{\o}v",

year = "1996",

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AU - Gulløv, Jens

PY - 1996

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N2 - A new piezoelectric silicon accelerometer design is presented. The design allows sensing in three directions. The accelerometer is designed to have a detection level of 10-3 m s-2 Hz-1/2 and a resonance frequency of 10 kHz.

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DO - 10.1088/0960-1317/6/1/032

M3 - Journal article

SN - 0960-1317

VL - 6

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EP - 133

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 1

ER -

A piezoelectric triaxial accelerometer

Abstract

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