A parametric study of the microstructural, mechanical and tribological properties of PACVD TiN coatings

K.S. Mogensen, N.B. Thomsen, S.S. Eskildsen, C. Mathiasen, J. Bøttiger

    Research output: Contribution to journalJournal articleResearch

    Abstract

    In order to design coatings with optimal wear and corrosion performance, knowledge of the structures and properties of the coatings and their dependence on the process parameters is required. Coatings of TiN deposited onto tool steels using an industrial, pulsed DC plasma-assisted chemical vapour deposition chamber were investigated. The process parameters, i.e, voltage, pressure, and flows of H-2, Ar, N, and TiCl4, were varied. The microstructural, mechanical and tribological properties of the coatings were investigated using X-ray diffraction, scanning electron microscopy, transmission electron microscopy, nanoindentation, pin-on-disc measurements and Rutherford backscattering spectrometry. The residual stress level and hardness varied significantly with changes in the process parameters, whereas the tribological properties displayed only minor variations. (C) 1998 Elsevier Science S.A.
    Original languageEnglish
    JournalSurface and Coatings Technology
    Volume99
    Issue number1-2
    Pages (from-to)140-146
    ISSN0257-8972
    DOIs
    Publication statusPublished - 1998

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