A parametric study of the microstructural, mechanical and tribological properties of PACVD TiN coatings

K.S. Mogensen; N.B. Thomsen; S.S. Eskildsen; C. Mathiasen; J. Bøttiger

doi:10.1016/S0257-8972(97)00420-9

A parametric study of the microstructural, mechanical and tribological properties of PACVD TiN coatings

K.S. Mogensen, N.B. Thomsen, S.S. Eskildsen, C. Mathiasen, J. Bøttiger

Research output: Contribution to journal › Journal article › Research

Abstract

In order to design coatings with optimal wear and corrosion performance, knowledge of the structures and properties of the coatings and their dependence on the process parameters is required. Coatings of TiN deposited onto tool steels using an industrial, pulsed DC plasma-assisted chemical vapour deposition chamber were investigated. The process parameters, i.e, voltage, pressure, and flows of H-2, Ar, N, and TiCl4, were varied. The microstructural, mechanical and tribological properties of the coatings were investigated using X-ray diffraction, scanning electron microscopy, transmission electron microscopy, nanoindentation, pin-on-disc measurements and Rutherford backscattering spectrometry. The residual stress level and hardness varied significantly with changes in the process parameters, whereas the tribological properties displayed only minor variations. (C) 1998 Elsevier Science S.A.

Original language	English
Journal	Surface and Coatings Technology
Volume	99
Issue number	1-2
Pages (from-to)	140-146
ISSN	0257-8972
DOIs	https://doi.org/10.1016/S0257-8972(97)00420-9
Publication status	Published - 1998

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title = "A parametric study of the microstructural, mechanical and tribological properties of PACVD TiN coatings",

abstract = "In order to design coatings with optimal wear and corrosion performance, knowledge of the structures and properties of the coatings and their dependence on the process parameters is required. Coatings of TiN deposited onto tool steels using an industrial, pulsed DC plasma-assisted chemical vapour deposition chamber were investigated. The process parameters, i.e, voltage, pressure, and flows of H-2, Ar, N, and TiCl4, were varied. The microstructural, mechanical and tribological properties of the coatings were investigated using X-ray diffraction, scanning electron microscopy, transmission electron microscopy, nanoindentation, pin-on-disc measurements and Rutherford backscattering spectrometry. The residual stress level and hardness varied significantly with changes in the process parameters, whereas the tribological properties displayed only minor variations. (C) 1998 Elsevier Science S.A. ",

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author = "K.S. Mogensen and N.B. Thomsen and S.S. Eskildsen and C. Mathiasen and J. B{\o}ttiger",

year = "1998",

doi = "10.1016/S0257-8972(97)00420-9",

language = "English",

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TY - JOUR

T1 - A parametric study of the microstructural, mechanical and tribological properties of PACVD TiN coatings

AU - Mogensen, K.S.

AU - Thomsen, N.B.

AU - Eskildsen, S.S.

AU - Mathiasen, C.

AU - Bøttiger, J.

PY - 1998

Y1 - 1998

N2 - In order to design coatings with optimal wear and corrosion performance, knowledge of the structures and properties of the coatings and their dependence on the process parameters is required. Coatings of TiN deposited onto tool steels using an industrial, pulsed DC plasma-assisted chemical vapour deposition chamber were investigated. The process parameters, i.e, voltage, pressure, and flows of H-2, Ar, N, and TiCl4, were varied. The microstructural, mechanical and tribological properties of the coatings were investigated using X-ray diffraction, scanning electron microscopy, transmission electron microscopy, nanoindentation, pin-on-disc measurements and Rutherford backscattering spectrometry. The residual stress level and hardness varied significantly with changes in the process parameters, whereas the tribological properties displayed only minor variations. (C) 1998 Elsevier Science S.A.

AB - In order to design coatings with optimal wear and corrosion performance, knowledge of the structures and properties of the coatings and their dependence on the process parameters is required. Coatings of TiN deposited onto tool steels using an industrial, pulsed DC plasma-assisted chemical vapour deposition chamber were investigated. The process parameters, i.e, voltage, pressure, and flows of H-2, Ar, N, and TiCl4, were varied. The microstructural, mechanical and tribological properties of the coatings were investigated using X-ray diffraction, scanning electron microscopy, transmission electron microscopy, nanoindentation, pin-on-disc measurements and Rutherford backscattering spectrometry. The residual stress level and hardness varied significantly with changes in the process parameters, whereas the tribological properties displayed only minor variations. (C) 1998 Elsevier Science S.A.

KW - Industrielle materialer

U2 - 10.1016/S0257-8972(97)00420-9

DO - 10.1016/S0257-8972(97)00420-9

M3 - Journal article

VL - 99

SP - 140

EP - 146

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 1-2

ER -