| Original language | English |
|---|---|
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 15 |
| Pages (from-to) | 883-891 |
| ISSN | 0960-1317 |
| Publication status | Published - 2005 |
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Research output: Contribution to journal › Journal article › Research › peer-review
| Original language | English |
|---|---|
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 15 |
| Pages (from-to) | 883-891 |
| ISSN | 0960-1317 |
| Publication status | Published - 2005 |