A novel DC Magnetron sputtering facility for space research and synchrotron radiation optics

A.M. Hussain, Finn Erland Christensen, G. Pareschi, H.F. Poulsen

Research output: Contribution to journalConference articleResearchpeer-review

Abstract

A new DC magnetron sputtering facility has been build up at the Danish Space Research Institute (DSRI), specially designed to enable uniform coatings of large area curved optics, such as Wolter-I mirror optics used in space telescopes and curved optics used in synchrotron radiation facilities. The paper is a brief description of this new facility and the future applications.
Original languageEnglish
JournalProceedings of SPIE, the International Society for Optical Engineering
Volume3444
Pages (from-to)443-450
ISSN0277-786X
DOIs
Publication statusPublished - 1998
Event1998 Conference on X-Ray Optics, Instruments, and Missions - San Diego, CA, United States
Duration: 19 Jul 199822 Jul 1998

Conference

Conference1998 Conference on X-Ray Optics, Instruments, and Missions
CountryUnited States
CitySan Diego, CA
Period19/07/199822/07/1998

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