Abstract
A new DC magnetron sputtering facility has been build up at the Danish Space Research Institute (DSRI), specially designed to enable uniform coatings of large area curved optics, such as Wolter-I mirror optics used in space telescopes and curved optics used in synchrotron radiation facilities. The paper is a brief description of this new facility and the future applications.
Original language | English |
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Journal | Proceedings of SPIE, the International Society for Optical Engineering |
Volume | 3444 |
Pages (from-to) | 443-450 |
ISSN | 0277-786X |
DOIs | |
Publication status | Published - 1998 |
Event | 1998 Conference on X-Ray Optics, Instruments, and Missions - San Diego, CA, United States Duration: 19 Jul 1998 → 22 Jul 1998 |
Conference
Conference | 1998 Conference on X-Ray Optics, Instruments, and Missions |
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Country | United States |
City | San Diego, CA |
Period | 19/07/1998 → 22/07/1998 |