A Method for Dimensional and Surface Optical Measurements Uncertainty Assessment on Micro Structured Surfaces Manufactured by Jet-ECM

Danilo Quagliotti, Guido Tosello, Aminul Islam, Hans Nørgaard Hansen, H. Zeidler, A. Martin, A. Schubert, C. Brandao, O. Riemer

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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    Abstract

    Surface texture and step height measurements of electrochemically machined cavities have been compared among optical and tactile instruments. A procedure is introduced for correcting possible divergences among the instruments and, ultimately, for evaluating the measurement uncertainty according to the ISO GUM.
    Original languageEnglish
    Title of host publicationProceedings of the 4M/ICOMM2015 Conference
    EditorsMassimiliano Annoni, Irene Fassi, Gloria J. Wiens, Stefan Dimov
    PublisherResearch Publishing Services
    Publication date2015
    Pages554-557
    Article number138
    ISBN (Electronic)978-981-09-4609-8
    DOIs
    Publication statusPublished - 2015
    Event4M/ICOMM2015 Conference - Milan, Italy
    Duration: 31 Mar 20152 Apr 2015
    http://www.4m-association.org/conference/2015

    Conference

    Conference4M/ICOMM2015 Conference
    Country/TerritoryItaly
    CityMilan
    Period31/03/201502/04/2015
    Internet address

    Keywords

    • Step height
    • Roughness
    • Micro-machining
    • Uncertainty
    • ISO GUM

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