A Method for Dimensional and Surface Optical Measurements Uncertainty Assessment on Micro Structured Surfaces Manufactured by Jet-ECM

Danilo Quagliotti, Guido Tosello, Aminul Islam, Hans Nørgaard Hansen, H. Zeidler, A. Martin, A. Schubert, C. Brandao, O. Riemer

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Abstract

Surface texture and step height measurements of electrochemically machined cavities have been compared among optical and tactile instruments. A procedure is introduced for correcting possible divergences among the instruments and, ultimately, for evaluating the measurement uncertainty according to the ISO GUM.
Original languageEnglish
Title of host publicationProceedings of the 4M/ICOMM2015 Conference
EditorsMassimiliano Annoni, Irene Fassi, Gloria J. Wiens, Stefan Dimov
PublisherResearch Publishing Services
Publication date2015
Pages554-557
Article number138
ISBN (Electronic)978-981-09-4609-8
DOIs
Publication statusPublished - 2015
Event4M/ICOMM2015 Conference - Milan, Italy
Duration: 31 Mar 20152 Apr 2015
http://www.4m-association.org/conference/2015

Conference

Conference4M/ICOMM2015 Conference
CountryItaly
CityMilan
Period31/03/201502/04/2015
Internet address

Keywords

  • Step height
  • Roughness
  • Micro-machining
  • Uncertainty
  • ISO GUM

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