Abstract
Surface texture and step height measurements of
electrochemically machined cavities have been compared among optical and
tactile instruments. A procedure is introduced for correcting possible
divergences among the instruments and, ultimately, for evaluating the
measurement uncertainty according to the ISO GUM.
Original language | English |
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Title of host publication | Proceedings of the 4M/ICOMM2015 Conference |
Editors | Massimiliano Annoni, Irene Fassi, Gloria J. Wiens, Stefan Dimov |
Publisher | Research Publishing Services |
Publication date | 2015 |
Pages | 554-557 |
Article number | 138 |
ISBN (Electronic) | 978-981-09-4609-8 |
DOIs | |
Publication status | Published - 2015 |
Event | 4M/ICOMM2015 Conference - Milan, Italy Duration: 31 Mar 2015 → 2 Apr 2015 http://www.4m-association.org/conference/2015 |
Conference
Conference | 4M/ICOMM2015 Conference |
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Country/Territory | Italy |
City | Milan |
Period | 31/03/2015 → 02/04/2015 |
Internet address |
Keywords
- Step height
- Roughness
- Micro-machining
- Uncertainty
- ISO GUM