Abstract
A method of charging a substrate with a plurality of through-going bores and a charged substrate, where the substrate is charged with a liquid comprising particles in a concentration resulting in a high percentage of bores charged with liquid with only a single particle therein.
| Original language | English |
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| IPC | B01J19/00; B01L3/00 |
| Patent number | WO2014001459A1 |
| Filing date | 03/01/2014 |
| Country/Territory | International Bureau of the World Intellectual Property Organization (WIPO) |
| Publication status | Published - 2014 |