A MEMS Energy Harvesting Device for Vibration with Low Acceleration

Marco Triches, Fei Wang, Andrea Crovetto, Anders Lei, Qiong You, Xiaoqing Zhang, Ole Hansen, Jan Dziuban (Editor), Rafal Walczak (Editor)

Research output: Contribution to journalConference articleResearchpeer-review

Abstract

We propose a polymer electret based energy harvesting device in order to extract energy from vibration sources with low acceleration. With MEMS technology, a silicon structure is fabricated which can resonate in 2D directions. Thanks to the excellent mechanical properties of the silicon material, the proof mass could be successfully driven by an external vibrations with acceleration as low as 0.014g (∼0.14 m/s2). A root mean square (RMS) power output of 1.17μW under 0.014g RMS acceleration at 75Hz is measured when an optimal load of 20.3 MΩ is applied. The frequency response of the device is also studied and a high Q factor of 250 is achieved.
Original languageEnglish
JournalProcedia Engineering
Volume47
Pages (from-to)770-773
ISSN1877-7058
DOIs
Publication statusPublished - 2012
EventEurosensors 2012: 26th European Conference on Solid-State Transducers - Krakow, Poland
Duration: 9 Sep 201212 Sep 2012
Conference number: 26

Conference

ConferenceEurosensors 2012
Number26
Country/TerritoryPoland
CityKrakow
Period09/09/201212/09/2012

Keywords

  • MEMS
  • Micro generator
  • Energy harvesting device
  • Wireless sensor networks

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