The mechanical impact of coatings containing residual stress on membranes is investigated. Closed-form formulas describing this impact are presented and verified using both finite element modeling and physical experiments. Theory and experiments are in good agreement. Thus, a simple tool for design of coated pressure sensors is provided.
|Title of host publication||Proceedings on The 14th IEEE International Conference on Micro Electro Mechanical Systems|
|Publication status||Published - 2001|
|Event||14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland|
Duration: 21 Jan 2001 → 25 Jan 2001
Conference number: 14
|Conference||14th IEEE International Conference on Micro Electro Mechanical Systems|
|Period||21/01/2001 → 25/01/2001|