A mechanical impact of coatings on membranes

Michael Søren Hansen, Roger De Reus, Gert Friis Eriksen, Siebe Bouwstra

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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    Abstract

    The mechanical impact of coatings containing residual stress on membranes is investigated. Closed-form formulas describing this impact are presented and verified using both finite element modeling and physical experiments. Theory and experiments are in good agreement. Thus, a simple tool for design of coated pressure sensors is provided.
    Original languageEnglish
    Title of host publicationProceedings on The 14th IEEE International Conference on Micro Electro Mechanical Systems
    Publication date2001
    Pages361-364
    ISBN (Print)0-7803-5998-4
    DOIs
    Publication statusPublished - 2001
    Event14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland
    Duration: 21 Jan 200125 Jan 2001
    Conference number: 14

    Conference

    Conference14th IEEE International Conference on Micro Electro Mechanical Systems
    Number14
    CountrySwitzerland
    CityInterlaken
    Period21/01/200125/01/2001

    Bibliographical note

    Copyright: 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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