A flexible equipment process datalog and sample tracking system

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

Original language	English
Publication date	2019
Number of pages	2
Publication status	Published - 2019
Event	2nd European Nanofabrication Research Infrastructure Symposium - University of Twente, Enschede, Netherlands Duration: 16 Jun 2019 → 18 Jun 2019 Conference number: 2 https://www.enris2019.com/

Conference	2nd European Nanofabrication Research Infrastructure Symposium
Number	2
Location	University of Twente
Country/Territory	Netherlands
City	Enschede
Period	16/06/2019 → 18/06/2019
Internet address	https://www.enris2019.com/

OpenUrl availability

@conference{8c11c7eb4d394c46991b71aefb182e66,

title = "A flexible equipment process datalog and sample tracking system",

author = "Jesper Hanberg and Henrik Nyholt and Th{\o}ger Eskildsen",

year = "2019",

language = "English",

note = "2nd European Nanofabrication Research Infrastructure Symposium, ENRIS 2019 ; Conference date: 16-06-2019 Through 18-06-2019",

url = "https://www.enris2019.com/",

}