TY - JOUR
T1 - A fast inversion method for highly conductive submicron wires on a substrate
AU - Karamehmedović, Mirza
AU - Hansen, P. -E.
AU - Wriedt, T.
PY - 2011
Y1 - 2011
N2 - A numerical method is presented for sizing of highly conductive penetrable and perfectly electrically conducting (PEC) submicron wires on substrates. For efficiency, the Method of Auxiliary Sources is used in the forward model of the inverse Kirsch-Kress Method. The radius of the circular cross section of PEC and silver wires positioned on a semi-infinite silicon substrate is estimated based on numerically simulated scattered far field. The illumination is monochromatic, transverse electric (TE) polarised, and with fixed angle of incidence. Average relative errors smaller than 1% and 5% are achieved for PEC and penetrable wires, respectively, in the dynamic ranges 0.2-1.3 and 0.8-1.3 times the operating free-space wavelength, respectively. In all cases, the inversion time is less than 1 sec.
AB - A numerical method is presented for sizing of highly conductive penetrable and perfectly electrically conducting (PEC) submicron wires on substrates. For efficiency, the Method of Auxiliary Sources is used in the forward model of the inverse Kirsch-Kress Method. The radius of the circular cross section of PEC and silver wires positioned on a semi-infinite silicon substrate is estimated based on numerically simulated scattered far field. The illumination is monochromatic, transverse electric (TE) polarised, and with fixed angle of incidence. Average relative errors smaller than 1% and 5% are achieved for PEC and penetrable wires, respectively, in the dynamic ranges 0.2-1.3 and 0.8-1.3 times the operating free-space wavelength, respectively. In all cases, the inversion time is less than 1 sec.
U2 - 10.2971/jeos.2011.11039
DO - 10.2971/jeos.2011.11039
M3 - Journal article
SN - 1990-2573
VL - 6
SP - -
JO - Journal of the European Optical Society - Rapid Publications
JF - Journal of the European Optical Society - Rapid Publications
M1 - 11039
ER -