A facility for plastic deformation of germanium single-crystal wafers

B. Lebech, K. Theodor, B. Breiting, P.G. Kealey, B. Hauback, J. Lebech, S.Å. Sørensen, K.N. Clausen

    Research output: Contribution to journalJournal articleResearch

    Abstract

    A facility for plastic deformation of single-crystal germanium wafers is described. It consists of a commercial tube furnace which radiates heat to evacuated quartz-glass tubes housing the tools for bending and flattening of the wafers. The facility is semi-automatic and requires minimal attention. All movements and temperature changes are done by a robot via a PLC-control system. Two nine-crystal focusing monochromators (54 x 116 and 70 x 116 mm(2)) made from 100 wafers with average mosaicity similar to 13' have been constructed. Summaries of the test results are presented. (C) 1998 Elsevier Science B.V. All rights reserved.
    Original languageEnglish
    JournalPhysica B: Condensed Matter
    Volume241-243
    Pages (from-to)204-206
    ISSN0921-4526
    DOIs
    Publication statusPublished - 1998

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