A controllable microswitch comprises a closed cavity having a plurality of contact electrodes, a movable switch body capable of making and breaking an electrical connection between the contact electrodes, and a plurality of control electrodes capable of generating an electrical field to control the position of the switch body. The switch body is formed by a diaphragm which is provided with a conducting surface and which divides the cavity into two subcavities. A method of making such a microswitch is moreover disclosed. The microswitch may be used for power regulation of systems connected to an electrical voltage source and for remote-controlled connection and disconnection of an electrical apparatus.
|Country||International Bureau of the World Intellectual Property Organization (WIPO)|
|Publication status||Published - 1996|