A complementary metal-oxide-semiconductor compatible monocantilever 12-point probe for conductivity measurements on the nanoscale

Lauge Gammelgaard, Peter Bøggild, J.W. Wells, K. Handrup, Ph. Hofmann, M.B. Balslev, J.E. Hansen, P.R.E Petersen

    Research output: Contribution to journal › Journal article › Research › peer-review

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