| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 2nd International Conference on Surface Metrology |
| Publication date | 2010 |
| Pages | 104-212 |
| Publication status | Published - 2010 |
| Externally published | Yes |
| Event | 2nd International Conference on Surface Metrology - Worcester, MA, United States Duration: 25 Oct 2010 → 27 Oct 2010 |
Conference
| Conference | 2nd International Conference on Surface Metrology |
|---|---|
| Country/Territory | United States |
| City | Worcester, MA |
| Period | 25/10/2010 → 27/10/2010 |