Original language | English |
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Title of host publication | Proceedings of the 2nd International Conference on Surface Metrology |
Publication date | 2010 |
Pages | 104-212 |
Publication status | Published - 2010 |
Externally published | Yes |
Event | 2nd International Conference on Surface Metrology - Worcester, MA, United States Duration: 25 Oct 2010 → 27 Oct 2010 |
Conference
Conference | 2nd International Conference on Surface Metrology |
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Country/Territory | United States |
City | Worcester, MA |
Period | 25/10/2010 → 27/10/2010 |